P

Inventor

MURAOKA YUSUKE

JP33 patents
⚠️ This page may combine multiple inventors who share the name “MURAOKA YUSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DAINIPPON SCREEN MFG

13 patents
US6067727AMay 30, 2000

Apparatus and method for drying substrates

DAINIPPON SCREEN MFG75 citations96
US5520744AMay 28, 1996

Device for rinsing and drying substrate

DAINIPPON SCREEN MFG210 citations96
US6841031B2Jan 11, 2005

Substrate processing apparatus equipping with high-pressure processing unit

DAINIPPON SCREEN MFG44 citations92
US6691430B2Feb 17, 2004

High-pressure drying apparatus, high-pressure drying method and substrate processing apparatus

DAINIPPON SCREEN MFG39 citations92
US4803948AFeb 14, 1989

Heat processing apparatus for semiconductor manufacturing

DAINIPPON SCREEN MFG38 citations92
US6074515AJun 13, 2000

Apparatus for processing substrates

DAINIPPON SCREEN MFG43 citations91
US5826601AOct 27, 1998

Treating liquid replacing method, substrate treating method and substrate treating apparatus

DAINIPPON SCREEN MFG64 citations91
US4849608AJul 18, 1989

Apparatus for heat-treating wafers

DAINIPPON SCREEN MFG31 citations91
US7384484B2Jun 10, 2008

Substrate processing method, substrate processing apparatus and substrate processing system

DAINIPPON SCREEN MFG18 citations82
US7562663B2Jul 21, 2009

High-pressure processing apparatus and high-pressure processing method

DAINIPPON SCREEN MFG3 citations62
US7435396B2Oct 14, 2008

High-pressure processing apparatus and high-pressure processing method

DAINIPPON SCREEN MFG4 citations62
US7000653B2Feb 21, 2006

High pressure processing apparatus and high pressure processing method

DAINIPPON SCREEN MFG1 citations62
US7252719B2Aug 7, 2007

High pressure processing method

DAINIPPON SCREEN MFG0 citations51

NEC CORP

8 patents

KOBE STEEL LTD

6 patents

OMRON TATEISI ELECTRONICS CO

1 patent

KUSUMURA YUKITAKA

1 patent

MURAOKA YUSUKE

1 patent

UNIV TOHOKU

1 patent

DOTDATA INC

1 patent

MIZUGUCHI HIRONORI

1 patent