Inventor
OONISHI TERUHITO
JP3 patents
Patents
3 patentsUS6455364B1Sep 24, 2002
Semiconductor device and method for fabricating the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD55 citations95
US6273959B1Aug 14, 2001
Method of cleaning semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD15 citations82
US6713790B2Mar 30, 2004
Semiconductor device and method for fabricating the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD2 citations62