P

Inventor

GOODWIN DENNIS

US4 patents
⚠️ This page may combine multiple inventors who share the name “GOODWIN DENNIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM INC

3 patents
US6161311ADec 19, 2000

System and method for reducing particles in epitaxial reactors

ASM INC33 citations88
US6331023B1Dec 18, 2001

Gridded substrate transport spatula

ASM INC19 citations75
US6550158B2Apr 22, 2003

Substrate handling chamber

ASM INC5 citations69

GOODWIN DENNIS

1 patent
US4774386ASep 27, 1988

Spanning device

GOODWIN DENNIS19 citations66