Inventor

MEEKS STEVEN W

US69 patents

⚠️ This page may combine multiple inventors who share the name “MEEKS STEVEN W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MEEKS STEVEN W

KLA TENCOR TECH CORP

System and method for double sided optical inspection of thin film disks or wafers

System and method for measuring object characteristics using phase differences in polarized light reflections

Wafer edge inspection

Wafer edge inspection

Wafer edge inspection

Surface scanning

Detecting multi-domain states in perpendicular magnetic media

Confocal scatterometer and method for single-sided detection of particles and defects on a transparent wafer or disk

Double sided optical inspection of thin film disks or wafers

Material independent optical profilometer

Combined high speed optical profilometer and ellipsometer

Material independent optical profilometer

Servo pattern characterization on magnetic disks

CANDELA INSTR

Combined high speed optical profilometer and ellipsometer

High speed optical profilometer for measuring surface height variation

System for simultaneously measuring thin film layer thickness, reflectivity, roughness, surface profile and magnetic pattern

System and method for measuring thin film properties and analyzing two-dimensional histograms using and/not operations

System and method for measuring thin film properties and analyzing two-dimensional histograms using substraction operation

System and method for measuring thin film properties and analyzing two-dimensional histograms using a symmetry operation

System and method for simultaneously measuring lubricant thickness and degradation, thin film thickness and wear, and surface roughness

System and method for simultaneously measuring thin film layer thickness, reflectivity, roughness, surface profile and magnetic pattern in thin film magnetic disks and silicon wafers

Method of automatically focusing an optical beam on transparent or reflective thin film wafers or disks

Method of detecting and classifying scratches and particles on thin film disks or wafers

Method of detecting and classifying scratches, particles and pits on thin film disks or wafers

Material independent optical profilometer

KLA TENCOR CORP

Wafer edge inspection

Scattered light separation

Material independent profiler

Multi-wavelength system and method for detecting epitaxial layer defects

Wafer edge inspection

Surface characteristic analysis

Surface finish roughness measurement

MEEKS STEVEN W

Wide spatial frequency topography and roughness measurement

Multi-surface scattered radiation differentiation

Optical inspector with selective scattered radiation blocker

Detecting and classifying surface defects with multiple radiation collectors

Optical inspector

LUMINA INSTR INC

Time domain multiplexed defect scanner

Time domain multiplexed defect scanner

Region prober optical inspector

Scattered radiation defect depth detection

ZETA INSTR INC

Multi-surface optical inspector

Multi-surface specular reflection inspector

Method of detecting defect location using multi-surface specular reflection

IBM

Process and apparatus for controlled laser texturing of magnetic recording disk

Process and apparatus for laser analysis of surface having a repetitive texture pattern

KLA TENCOR TECHNOLOGIES

System and method for measuring properties of an object using a phase difference between two reflected light signals

CANDELA INSTR INC

High temperature thin film property measurement system and method

MAXTOR CORP

Method and apparatus for reading a clock track with a magneto-optical clock head using the transverse Kerr effect

RAMACHANDRAN MAHENDRA PRABHU

Substrate inspection