Inventor

HOMMI Motonobu

JP2 patents

Patents

2 patents

US11670481B2Jun 6, 2023

Charged particle beam device

HITACHI HIGH TECH CORP0 citations56

US9804107B2Oct 31, 2017

Pattern measurement device and computer program for evaluating patterns based on centroids of the patterns

HITACHI HIGH TECH CORP0 citations36