Inventor
TSUKAMOTO MASAMI
JP27 patents
⚠️ This page may combine multiple inventors who share the name “TSUKAMOTO MASAMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
26 patentsUS5896438AApr 20, 1999
X-ray optical apparatus and device fabrication method
CANON KK134 citations98
US6317479B1Nov 13, 2001
X-ray mask, and exposure method and apparatus using the same
CANON KK75 citations96
US6084938AJul 4, 2000
X-ray projection exposure apparatus and a device manufacturing method
CANON KK52 citations96
US5995582ANov 30, 1999
X-ray reduction exposure apparatus and device manufacturing method using the same
CANON KK56 citations96
US7061573B2Jun 13, 2006
Contamination prevention in optical system
CANON KK49 citations92
US6728332B2Apr 27, 2004
X-ray mask, and exposure method and apparatus using the same
CANON KK20 citations92
US6504896B2Jan 7, 2003
X-ray illumination optical system and x-ray reduction exposure apparatus
CANON KK26 citations92
US6331709B1Dec 18, 2001
Alignment mark detection method, and alignment method, exposure method and device, and device production method making use of the alignment mark detection method
CANON KK17 citations92
US6038279AMar 14, 2000
X-ray generating device, and exposure apparatus and semiconductor device production method using the X-ray generating device
CANON KK48 citations92
US6014421AJan 11, 2000
Radiation reduction exposure apparatus and method of manufacturing semiconductor device
CANON KK31 citations92
US5889758AMar 30, 1999
Reflection type mask structure and exposure apparatus using the same
CANON KK21 citations92
US6802925B2Oct 12, 2004
Laminating film and lamination process using the same
CANON KK17 citations84
US6723475B2Apr 20, 2004
Reflection-type mask for use in pattern exposure, manufacturing method therefor, exposure apparatus, and method of manufacturing a device
CANON KK14 citations84
US7072438B2Jul 4, 2006
Reflection type mask
CANON KK5 citations74
US6584168B2Jun 24, 2003
X-ray projection exposure apparatus and a device manufacturing method
CANON KK5 citations74
US6310934B1Oct 30, 2001
X-ray projection exposure apparatus and a device manufacturing method
CANON KK8 citations74
US9842985B2Dec 12, 2017
Manufacturing method for piezoelectric ceramics
CANON KK4 citations73
US7133489B2Nov 7, 2006
X-ray illumination optical system and X-ray reduction exposure apparatus
CANON KK2 citations63
US6836531B2Dec 28, 2004
X-ray projection exposure apparatus and a device manufacturing method
CANON KK2 citations63
US6668037B2Dec 23, 2003
X-ray projection exposure apparatus and a device manufacturing method
CANON KK2 citations63
US6819396B1Nov 16, 2004
Exposure apparatus, and device manufacturing method
CANON KK4 citations62
US11069729B2Jul 20, 2021
Photoelectric conversion device, and equipment
CANON KK0 citations61
US11774607B2Oct 3, 2023
Scintillator panel and radiation imaging apparatus
CANON KK0 citations59
US6834098B2Dec 21, 2004
X-ray illumination optical system and X-ray reduction exposure apparatus
CANON KK0 citations52
US6642528B2Nov 4, 2003
Alignment mark detection method, and alignment method, exposure method and device, and device production method, making use of the alignment mark detection method
CANON KK1 citations52
US7425363B2Sep 16, 2008
Laminate film and composite structure with imaged recording medium
CANON KK0 citations41