Inventor

KUSHNER MARK J

US2 patents

⚠️ This page may combine multiple inventors who share the name “KUSHNER MARK J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATTSON TECH INC

1 patent

US6706142B2Mar 16, 2004

Systems and methods for enhancing plasma processing of a semiconductor substrate

MATTSON TECH INC35 citations90

US AIR FORCE

1 patent

US5023877AJun 11, 1991

Miniature, optically pumped narrow line solid state laser

US AIR FORCE42 citations88