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Inventor
KINDER RONALD L
US
4 patents
⚠️ This page may combine multiple inventors who share the name “KINDER RONALD L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
2 patents
US7922880B1
Apr 12, 2011
Method and apparatus for increasing local plasma density in magnetically confined plasma
NOVELLUS SYSTEMS INC
67 citations
96
US7897516B1
Mar 1, 2011
Use of ultra-high magnetic fields in resputter and plasma etching
NOVELLUS SYSTEMS INC
24 citations
91
MATTSON TECH INC
1 patent
US6706142B2
Mar 16, 2004
Systems and methods for enhancing plasma processing of a semiconductor substrate
MATTSON TECH INC
35 citations
90
PRADHAN ANSHU A
1 patent
US8449731B1
May 28, 2013
Method and apparatus for increasing local plasma density in magnetically confined plasma
PRADHAN ANSHU A
10 citations
81