Inventor
WASSEN DAVID A
US2 patents
Patents
2 patentsUS7008879B2Mar 7, 2006
Isolation chamber arrangement for serial processing of semiconductor wafers for the electronic industry
SEMIGEAR INC391 citations95
US6827789B2Dec 7, 2004
Isolation chamber arrangement for serial processing of semiconductor wafers for the electronic industry
SEMIGEAR INC421 citations95