Inventor
IM JAMES S
US68 patents
⚠️ This page may combine multiple inventors who share the name “IM JAMES S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV COLUMBIA
33 patentsUS6563077B2May 13, 2003
System for providing a continuous motion sequential lateral solidification
UNIV COLUMBIA131 citations99
US6555449B1Apr 29, 2003
Methods for producing uniform large-grained and grain boundary location manipulated polycrystalline thin film semiconductors using sequential lateral solidfication
UNIV COLUMBIA167 citations99
US6368945B1Apr 9, 2002
Method and system for providing a continuous motion sequential lateral solidification
UNIV COLUMBIA212 citations99
US6322625B2Nov 27, 2001
Crystallization processing of semiconductor film regions on a substrate, and devices made therewith
UNIV COLUMBIA276 citations99
US6908835B2Jun 21, 2005
Method and system for providing a single-scan, continuous motion sequential lateral solidification
UNIV COLUMBIA103 citations98
US6830993B1Dec 14, 2004
Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method
UNIV COLUMBIA79 citations98
US6635554B1Oct 21, 2003
Systems and methods using sequential lateral solidification for producing single or polycrystalline silicon thin films at low temperatures
UNIV COLUMBIA105 citations98
US6582827B1Jun 24, 2003
Specialized substrates for use in sequential lateral solidification processing
UNIV COLUMBIA97 citations98
US6573531B1Jun 3, 2003
Systems and methods using sequential lateral solidification for producing single or polycrystalline silicon thin films at low temperatures
UNIV COLUMBIA121 citations98
US7319056B2Jan 15, 2008
Methods for producing uniform large-grained and grain boundary location manipulated polycrystalline thin film semiconductors using sequential lateral solidification
UNIV COLUMBIA43 citations96
US7029996B2Apr 18, 2006
Methods for producing uniform large-grained and grain boundary location manipulated polycrystalline thin film semiconductors using sequential lateral solidification
UNIV COLUMBIA60 citations96
US6961117B2Nov 1, 2005
Process and mask projection system for laser crystallization processing of semiconductor film regions on a substrate
UNIV COLUMBIA59 citations96
US7311778B2Dec 25, 2007
Single scan irradiation for crystallization of thin films
UNIV COLUMBIA53 citations94
US7906414B2Mar 15, 2011
Single-shot semiconductor processing system and method having various irradiation patterns
UNIV COLUMBIA22 citations93
US7759230B2Jul 20, 2010
System for providing a continuous motion sequential lateral solidification for reducing or eliminating artifacts in overlap regions, and a mask for facilitating such artifact reduction/elimination
UNIV COLUMBIA22 citations93
US7709378B2May 4, 2010
Method and apparatus for processing thin metal layers
UNIV COLUMBIA19 citations93
US7691687B2Apr 6, 2010
Method for processing laser-irradiated thin films having variable thickness
UNIV COLUMBIA19 citations93
US7399359B2Jul 15, 2008
Method and system for providing a thin film with a controlled crystal orientation using pulsed laser induced melting and nucleation-initiated crystallization
UNIV COLUMBIA29 citations93
US7341928B2Mar 11, 2008
System and process for processing a plurality of semiconductor thin films which are crystallized using sequential lateral solidification techniques
UNIV COLUMBIA35 citations93
US7300858B2Nov 27, 2007
Laser crystallization and selective patterning using multiple beamlets
UNIV COLUMBIA29 citations93
US7115503B2Oct 3, 2006
Method and apparatus for processing thin metal layers
UNIV COLUMBIA32 citations93
US7679028B2Mar 16, 2010
Methods for producing uniform large-grained and grain boundary location manipulated polycrystalline thin film semiconductors using sequential lateral solidification
UNIV COLUMBIA10 citations92
US7645337B2Jan 12, 2010
Systems and methods for creating crystallographic-orientation controlled poly-silicon films
UNIV COLUMBIA62 citations92
US7220660B2May 22, 2007
Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method
UNIV COLUMBIA17 citations92
US7964480B2Jun 21, 2011
Single scan irradiation for crystallization of thin films
UNIV COLUMBIA15 citations91
US8012861B2Sep 6, 2011
Systems and methods for preparing epitaxially textured polycrystalline films
UNIV COLUMBIA12 citations84
US7622370B2Nov 24, 2009
Process and system for laser crystallization processing of film regions on a substrate to minimize edge areas, and a structure of such film regions
UNIV COLUMBIA12 citations84
US7704862B2Apr 27, 2010
Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method
UNIV COLUMBIA5 citations74
US7638728B2Dec 29, 2009
Enhancing the width of polycrystalline grains with mask
UNIV COLUMBIA6 citations74
US9646831B2May 9, 2017
Advanced excimer laser annealing for thin films
UNIV COLUMBIA3 citations73
US8883656B2Nov 11, 2014
Single-shot semiconductor processing system and method having various irradiation patterns
UNIV COLUMBIA1 citations63
US8034698B2Oct 11, 2011
Systems and methods for inducing crystallization of thin films using multiple optical paths
UNIV COLUMBIA4 citations63
US7902052B2Mar 8, 2011
System and process for processing a plurality of semiconductor thin films which are crystallized using sequential lateral solidification techniques
UNIV COLUMBIA2 citations63
IM JAMES S
16 patentsUS7259081B2Aug 21, 2007
Process and system for laser crystallization processing of film regions on a substrate to provide substantial uniformity, and a structure of such film regions
IM JAMES S34 citations93
US8411713B2Apr 2, 2013
Process and system for laser crystallization processing of film regions on a substrate to minimize edge areas, and structure of such film regions
IM JAMES S6 citations84
US8221544B2Jul 17, 2012
Line scan sequential lateral solidification of thin films
IM JAMES S6 citations82
US8440581B2May 14, 2013
Systems and methods for non-periodic pulse sequential lateral solidification
IM JAMES S13 citations81
US8278659B2Oct 2, 2012
Uniform large-grained and grain boundary location manipulated polycrystalline thin film semiconductors formed using sequential lateral solidification and devices formed thereon
IM JAMES S5 citations74
US8617313B2Dec 31, 2013
Line scan sequential lateral solidification of thin films
IM JAMES S5 citations71
US9087696B2Jul 21, 2015
Systems and methods for non-periodic pulse partial melt film processing
IM JAMES S5 citations68
US8802580B2Aug 12, 2014
Systems and methods for the crystallization of thin films
IM JAMES S3 citations63
US8663387B2Mar 4, 2014
Method and system for facilitating bi-directional growth
IM JAMES S2 citations63
US8557040B2Oct 15, 2013
Systems and methods for preparation of epitaxially textured thick films
IM JAMES S2 citations63
US8507368B2Aug 13, 2013
Single-shot semiconductor processing system and method having various irradiation patterns
IM JAMES S2 citations63
US8479681B2Jul 9, 2013
Single-shot semiconductor processing system and method having various irradiation patterns
IM JAMES S1 citations63
US8426296B2Apr 23, 2013
Systems and methods for preparing epitaxially textured polycrystalline films
IM JAMES S4 citations63
US7718517B2May 18, 2010
Single-shot semiconductor processing system and method having various irradiation patterns
IM JAMES S1 citations63
US8734584B2May 27, 2014
Systems and methods for creating crystallographic-orientation controlled poly-silicon films
IM JAMES S2 citations61
US8445365B2May 21, 2013
Single scan irradiation for crystallization of thin films
IM JAMES S1 citations61
SAMSUNG ELECTRONICS CO LTD
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