Inventor
BAILEY CURTIS
US14 patents
⚠️ This page may combine multiple inventors who share the name “BAILEY CURTIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS10851457B2Dec 1, 2020
PECVD deposition system for deposition on selective side of the substrate
LAM RES CORP14 citations91
US11725283B2Aug 15, 2023
PECVD deposition system for deposition on selective side of the substrate
LAM RES CORP5 citations83
US11441222B2Sep 13, 2022
PECVD deposition system for deposition on selective side of the substrate
LAM RES CORP7 citations83
US10354857B2Jul 16, 2019
High power low pressure UV bulb with plasma resistant coating
LAM RES CORP6 citations81
US11851760B2Dec 26, 2023
PECVD deposition system for deposition on selective side of the substrate
LAM RES CORP1 citations70
US9637821B2May 2, 2017
Method for supplying vaporized precursor
LAM RES CORP0 citations48
US10240236B2Mar 26, 2019
Clean resistant windows for ultraviolet thermal processing
LAM RES CORP0 citations40