Inventor
WADA SHIGEKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “WADA SHIGEKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC CORP
6 patentsUS6087256AJul 11, 2000
Method for manufacturing modified T-shaped gate electrode
NEC CORP28 citations91
US7696838B2Apr 13, 2010
Equalizing filter circuit
NEC CORP9 citations83
US7983370B2Jul 19, 2011
Clock and data recovery circuit
NEC CORP8 citations82
US6008136ADec 28, 1999
Method for manufacturing semiconductor device capable of improving etching rate ratio of insulator to refractory metal
NEC CORP15 citations81
US6214744B1Apr 10, 2001
Method for manufacturing semiconductor device capable of improving etching rate ratio of insulator to refractory metal
NEC CORP11 citations72
US7652544B2Jan 26, 2010
Voltage controlled oscillator and frequency control method of the voltage controlled oscillator
NEC CORP0 citations51
TOKYO ELECTRON LTD
4 patentsUS6981808B2Jan 3, 2006
Substrate processing apparatus and substrate transferring method
TOKYO ELECTRON LTD8 citations72
US7529595B2May 5, 2009
Method of controlling substrate processing apparatus and substrate processing apparatus
TOKYO ELECTRON LTD4 citations62
US7449349B2Nov 11, 2008
Processing schedule creating method, coating and developing apparatus, pattern forming apparatus and processing system
TOKYO ELECTRON LTD4 citations62
US7167769B2Jan 23, 2007
Inline connection setting method and device and substrate processing devices and substrate processing system
TOKYO ELECTRON LTD2 citations61