Inventor
NAMBA HIROMITSU
JP12 patents
⚠️ This page may combine multiple inventors who share the name “NAMBA HIROMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS8828183B2Sep 9, 2014
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD30 citations90
US9859136B2Jan 2, 2018
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD5 citations82
US11437252B2Sep 6, 2022
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD2 citations71
US9508567B2Nov 29, 2016
Cleaning jig and cleaning method for cleaning substrate processing apparatus, and substrate processing system
TOKYO ELECTRON LTD3 citations71
US9165800B2Oct 20, 2015
Liquid processing method, liquid processing apparatus and storage medium
TOKYO ELECTRON LTD2 citations61
US10707102B2Jul 7, 2020
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations50