Inventor

WU CHIH-CHANG

TW2 patents

Patents

2 patents

US11939664B2Mar 26, 2024

System and method for performing semiconductor processes with coated bell jar

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations54

US12500106B2Dec 16, 2025

Semiconductor processing tool and methods of operation

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations40