Inventor
DIBIASE TONY
US8 patents
⚠️ This page may combine multiple inventors who share the name “DIBIASE TONY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
5 patentsUS7408642B1Aug 5, 2008
Registration target design for managing both reticle grid error and wafer overlay
KLA TENCOR TECH CORP78 citations95
US7846266B1Dec 7, 2010
Environment friendly methods and systems for template cleaning and reclaiming in imprint lithography technology
KLA TENCOR TECH CORP15 citations82
US6977183B1Dec 20, 2005
Process for locating, displaying, analyzing, and optionally monitoring potential transient defect sites in one or more integrated circuit chips of a semiconductor substrate
KLA TENCOR TECH CORP15 citations82
US7924408B2Apr 12, 2011
Temperature effects on overlay accuracy
KLA TENCOR TECH CORP4 citations61
US7202094B2Apr 10, 2007
Process for locating, displaying, analyzing, and optionally monitoring potential transient defect sites in one or more integrated circuit chips of a semiconductor substrate
KLA TENCOR TECH CORP0 citations50