Inventor

KOKAZE YUTAKA

JP2 patents

⚠️ This page may combine multiple inventors who share the name “KOKAZE YUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UEDA MASAHISA

1 patent

US8133325B2Mar 13, 2012

Dry cleaning method for plasma processing apparatus

UEDA MASAHISA0 citations31

KOKAZE YUTAKA

1 patent

US9305752B2Apr 5, 2016

Method for operating substrate processing apparatus

KOKAZE YUTAKA0 citations27