Inventor
KOO SHIANG-LUNG
US4 patents
⚠️ This page may combine multiple inventors who share the name “KOO SHIANG-LUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
YANG PAI-HSUEH
3 patentsUS9465305B2Oct 11, 2016
Method for determining a commutation offset and for determining a compensation map for a stage
YANG PAI-HSUEH3 citations70
US9013134B2Apr 21, 2015
Method for determing a commutation offset and for determining a compensation map for a stage
YANG PAI-HSUEH1 citations49
US8451431B2May 28, 2013
Control systems and methods applying iterative feedback tuning for feed-forward and synchronization control of microlithography stages and the like
YANG PAI-HSUEH0 citations47