Inventor

YANG PAI-HSUEH

US20 patents

⚠️ This page may combine multiple inventors who share the name “YANG PAI-HSUEH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YANG PAI-HSUEH

NIKON CORP

Modular stage with reaction force cancellation

Fine force actuator assembly for chemical mechanical polishing apparatuses

Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage

Auto-calibration of attraction-only type actuator commutations

Fine force control of actuators for chemical mechanical polishing apparatuses

Active-isolation mounts for optical elements

E/I core actuator commutation formula and control method

Dual valve fluid actuator assembly

Magnetic sensor calibration and servo for planar motor stage

Magnet array for moving magnet planar motor

YANG PAI-HSUEH

On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage

Method for determining a commutation offset and for determining a compensation map for a stage

Method for calibrating a force constant of a motorized stage used for supporting and moving a workpiece

Method for determing a commutation offset and for determining a compensation map for a stage

Control systems and methods applying iterative feedback tuning for feed-forward and synchronization control of microlithography stages and the like

Methods for limiting counter-mass trim-motor force and stage assemblies incorporating same

BINNARD MICHAEL B

Method and apparatus to allow a plurality of stages to operate in close proximity

Control systems and methods for compensating for effects of a stage motor

BINNARD MICHAEL

Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage

NIKON RES CORPORATION OF AMERICA

Motor with force constant modeling and identification for flexible mode control