Inventor
HATASAWA MASATO
JP4 patents
Patents
4 patentsUS5973863AOct 26, 1999
Exposure projection apparatus
NIKON CORP93 citations96
US5137349AAug 11, 1992
Projection-type optical apparatus
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US6922293B2Jul 26, 2005
Kinematic optical mounting assembly with flexures
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US5852518ADec 22, 1998
Projection optical unit and projection exposure apparatus comprising the same
NIKON CORP51 citations91