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Inventor
SCHAEFFER FRANK
DE
2 patents
Patents
2 patents
US7833405B2
Nov 16, 2010
Micromechanical component and corresponding production method
BOSCH GMBH ROBERT
7 citations
71
US6972447B2
Dec 6, 2005
Semiconductor component having a first earlier structure differing from a second earlier structure
BOSCH GMBH ROBERT
3 citations
60