Inventor
RODIN SERGEI
RU5 patents
⚠️ This page may combine multiple inventors who share the name “RODIN SERGEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
3 patentsUS7340706B2Mar 4, 2008
Method and system for analyzing the quality of an OPC mask
LSI LOGIC CORP7 citations69
US6911285B2Jun 28, 2005
Sidelobe correction for attenuated phase shift masks
LSI LOGIC CORP4 citations57
US6785871B2Aug 31, 2004
Automatic recognition of an optically periodic structure in an integrated circuit design
LSI LOGIC CORP1 citations49