Inventor
Lee JoJo
TW2 patents
Patents
2 patentsUS10297453B2May 21, 2019
Pre-deposition treatment and atomic layer deposition (ALD) process and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD11 citations83
US9947540B2Apr 17, 2018
Pre-deposition treatment and atomic layer deposition (ALD) process and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD14 citations83