Inventor
LINDSAY BERNARD G
US5 patents
⚠️ This page may combine multiple inventors who share the name “LINDSAY BERNARD G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT
3 patentsUS8926850B2Jan 6, 2015
Plasma processing with enhanced charge neutralization and process control
VARIAN SEMICONDUCTOR EQUIPMENT59 citations97
US7453059B2Nov 18, 2008
Technique for monitoring and controlling a plasma process
VARIAN SEMICONDUCTOR EQUIPMENT21 citations91
US8344318B2Jan 1, 2013
Technique for monitoring and controlling a plasma process with an ion mobility spectrometer
VARIAN SEMICONDUCTOR EQUIPMENT4 citations61