Inventor
SARMA CHANDRASEKHAR
US25 patents
⚠️ This page may combine multiple inventors who share the name “SARMA CHANDRASEKHAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
14 patentsUS7223612B2May 29, 2007
Alignment of MTJ stack to conductive lines in the absence of topography
INFINEON TECHNOLOGIES AG280 citations98
US7687925B2Mar 30, 2010
Alignment marks for polarized light lithography and method for use thereof
INFINEON TECHNOLOGIES AG19 citations92
US7947431B2May 24, 2011
Lithography masks and methods of manufacture thereof
INFINEON TECHNOLOGIES AG7 citations83
US7442624B2Oct 28, 2008
Deep alignment marks on edge chips for subsequent alignment of opaque layers
INFINEON TECHNOLOGIES AG15 citations82
US8359562B2Jan 22, 2013
System and method for semiconductor device fabrication using modeling
INFINEON TECHNOLOGIES AG5 citations72
US8349528B2Jan 8, 2013
Semiconductor devices and methods of manufacturing thereof
INFINEON TECHNOLOGIES AG2 citations62
US7863130B2Jan 4, 2011
Tunable stressed polycrystalline silicon on dielectrics in an integrated circuit
INFINEON TECHNOLOGIES AG2 citations62
US7799486B2Sep 21, 2010
Lithography masks and methods of manufacture thereof
INFINEON TECHNOLOGIES AG2 citations62
US7794903B2Sep 14, 2010
Metrology systems and methods for lithography processes
INFINEON TECHNOLOGIES AG1 citations62
US7674350B2Mar 9, 2010
Feature dimension control in a manufacturing process
INFINEON TECHNOLOGIES AG2 citations62
US7666800B2Feb 23, 2010
Feature patterning methods
INFINEON TECHNOLOGIES AG2 citations62
US8377800B2Feb 19, 2013
Alignment marks for polarized light lithography and method for use thereof
INFINEON TECHNOLOGIES AG0 citations52
US8007985B2Aug 30, 2011
Semiconductor devices and methods of manufacturing thereof
INFINEON TECHNOLOGIES AG0 citations52
US7842579B2Nov 30, 2010
Method for manufacturing a semiconductor device having doped and undoped polysilicon layers
INFINEON TECHNOLOGIES AG0 citations51