Inventor

BRODIE ALAN

US8 patents

⚠️ This page may combine multiple inventors who share the name “BRODIE ALAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

3 patents

US9874597B2Jan 23, 2018

Light-emitting device test systems

KLA TENCOR CORP4 citations70

US8642981B1Feb 4, 2014

Electron microscope assembly for viewing the wafer plane image of an electron beam lithography tool

KLA TENCOR CORP3 citations59

US11302511B2Apr 12, 2022

Field curvature correction for multi-beam inspection systems

KLA TENCOR CORP0 citations50

KLA TENCOR TECH CORP

2 patents

US7828622B1Nov 9, 2010

Sharpening metal carbide emitters

KLA TENCOR TECH CORP12 citations83

US7855362B1Dec 21, 2010

Contamination pinning for auger analysis

KLA TENCOR TECH CORP6 citations61

KLA CORP

2 patents

US11699607B2Jul 11, 2023

Segmented multi-channel, backside illuminated, solid state detector with a through-hole for detecting secondary and backscattered electrons

KLA CORP1 citations60

US12322568B2Jun 3, 2025

Auto-focus sensor implementation for multi-column microscopes

KLA CORP0 citations55

STANDIFORD KEITH

1 patent

US8063365B1Nov 22, 2011

Non-shot-noise-limited source for electron beam lithography or inspection

STANDIFORD KEITH8 citations78