Inventor

SOLARZ RICHARD W

US11 patents

⚠️ This page may combine multiple inventors who share the name “SOLARZ RICHARD W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

6 patents

US9377414B2Jun 28, 2016

EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers

KLA TENCOR CORP2 citations62

US8692986B2Apr 8, 2014

EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers

KLA TENCOR CORP1 citations62

US9519033B2Dec 13, 2016

High throughput hot testing method and system for high-brightness light-emitting diodes

KLA TENCOR CORP2 citations61

US8927944B2Jan 6, 2015

High throughput hot testing method and system for high-brightness light-emitting diodes

KLA TENCOR CORP3 citations61

US9735534B2Aug 15, 2017

Sub 200nm laser pumped homonuclear excimer lasers

KLA TENCOR CORP1 citations51

US11035804B2Jun 15, 2021

System and method for x-ray imaging and classification of volume defects

KLA TENCOR CORP0 citations50

SOLARZ RICHARD W

2 patents

US8575576B2Nov 5, 2013

Optical imaging system with laser droplet plasma illuminator

SOLARZ RICHARD W6 citations64

US8218221B1Jul 10, 2012

Indium rich InGaN LED line monitor

SOLARZ RICHARD W1 citations48

BEZEL ILYA V

1 patent

US8698399B2Apr 15, 2014

Multi-wavelength pumping to sustain hot plasma

BEZEL ILYA V8 citations75

US ENERGY

1 patent

US6738399B1May 18, 2004

Microchannel cooled edge cladding to establish an adiabatic boundary condition in a slab laser

US ENERGY8 citations72

CHUANG YUNG-HO

1 patent

US8553217B2Oct 8, 2013

EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers

CHUANG YUNG-HO3 citations62