Inventor
HWANG SHIOW-HWEI
US13 patents
⚠️ This page may combine multiple inventors who share the name “HWANG SHIOW-HWEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
9 patentsUS7061625B1Jun 13, 2006
Method and apparatus using interferometric metrology for high aspect ratio inspection
KLA TENCOR TECH CORP85 citations97
US7209239B2Apr 24, 2007
System and method for coherent optical inspection
KLA TENCOR TECH CORP16 citations92
US7259869B2Aug 21, 2007
System and method for performing bright field and dark field optical inspection
KLA TENCOR TECH CORP19 citations90
US7095507B1Aug 22, 2006
Method and apparatus using microscopic and interferometric based detection
KLA TENCOR TECH CORP30 citations90
US7924434B2Apr 12, 2011
Systems configured to generate output corresponding to defects on a specimen
KLA TENCOR TECH CORP8 citations83
US7327464B2Feb 5, 2008
System and method for coherent optical inspection
KLA TENCOR TECH CORP7 citations73
US7738089B2Jun 15, 2010
Methods and systems for inspection of a specimen using different inspection parameters
KLA TENCOR TECH CORP7 citations71
US8355140B2Jan 15, 2013
Systems configured to generate output corresponding to defects on a specimen
KLA TENCOR TECH CORP3 citations62
US8384887B2Feb 26, 2013
Methods and systems for inspection of a specimen using different inspection parameters
KLA TENCOR TECH CORP1 citations49