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Inventor
GASPARITSCH JEFF
US
2 patents
Patents
2 patents
US6645046B1
Nov 11, 2003
Conditioning mechanism in a chemical mechanical polishing apparatus for semiconductor wafers
LAM RES CORP
40 citations
87
US6729945B2
May 4, 2004
Apparatus for controlling leading edge and trailing edge polishing
LAM RES CORP
11 citations
70