Inventor

DIETL WALTRAUD

DE2 patents

⚠️ This page may combine multiple inventors who share the name “DIETL WALTRAUD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATTSON TECH INC

1 patent

US7101812B2Sep 5, 2006

Method of forming and/or modifying a dielectric film on a semiconductor surface

MATTSON TECH INC10 citations68

DIETL WALTRAUD

1 patent

US9111970B2Aug 18, 2015

Apparatus for the heat treatment of disc shaped substrates

DIETL WALTRAUD0 citations22