Inventor
SCHIMMEL HENDRIKUS GIJSBERTUS
NL20 patents
⚠️ This page may combine multiple inventors who share the name “SCHIMMEL HENDRIKUS GIJSBERTUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS10222701B2Mar 5, 2019
Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method
ASML NETHERLANDS BV11 citations78
US9411238B2Aug 9, 2016
Source-collector device, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV4 citations72
US11175596B2Nov 16, 2021
Particle traps and barriers for particle suppression
ASML NETHERLANDS BV5 citations71
US10359710B2Jul 23, 2019
Radiation system and optical device
ASML NETHERLANDS BV5 citations70
US9753383B2Sep 5, 2017
Radiation source and lithographic apparatus
ASML NETHERLANDS BV2 citations69
US7397538B2Jul 8, 2008
Radiation system and lithographic apparatus
ASML NETHERLANDS BV3 citations61
US10394141B2Aug 27, 2019
Radiation source and lithographic apparatus
ASML NETHERLANDS BV1 citations58
US9671698B2Jun 6, 2017
Fuel stream generator, source collector apparatus and lithographic apparatus
ASML NETHERLANDS BV1 citations51
US9363879B2Jun 7, 2016
Module and method for producing extreme ultraviolet radiation
ASML NETHERLANDS BV0 citations51
US10095119B2Oct 9, 2018
Radiation source and method for lithography
ASML NETHERLANDS BV0 citations50
SCHIMMEL HENDRIKUS GIJSBERTUS
5 patentsUS9113539B2Aug 18, 2015
Radiation source
SCHIMMEL HENDRIKUS GIJSBERTUS2 citations60
US8319200B2Nov 27, 2012
Radiation source, lithographic apparatus and device manufacturing method
SCHIMMEL HENDRIKUS GIJSBERTUS2 citations57
US9310689B2Apr 12, 2016
Radiation source and lithographic apparatus
SCHIMMEL HENDRIKUS GIJSBERTUS1 citations50
US8711325B2Apr 29, 2014
Method and system for determining a suppression factor of a suppression system and a lithographic apparatus
SCHIMMEL HENDRIKUS GIJSBERTUS0 citations45
US8232537B2Jul 31, 2012
Radiation source, lithographic apparatus and device manufacturing method
SCHIMMEL HENDRIKUS GIJSBERTUS0 citations40