Inventor
VAN EMPEL TJARKO ADRIAAN RUDOLF
NL23 patents
⚠️ This page may combine multiple inventors who share the name “VAN EMPEL TJARKO ADRIAAN RUDOLF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS7924399B2Apr 12, 2011
Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods
ASML NETHERLANDS BV6 citations73
US7492441B2Feb 17, 2009
Lithographic apparatus and device manufacturing method incorporating a pressure shield
ASML NETHERLANDS BV6 citations73
US9455172B2Sep 27, 2016
Electrostatic clamp
ASML NETHERLANDS BV4 citations72
US7542127B2Jun 2, 2009
Lithographic apparatus and method for manufacturing a device
ASML NETHERLANDS BV7 citations71
US7700930B2Apr 20, 2010
Lithographic apparatus with rotation filter device
ASML NETHERLANDS BV2 citations62
US7432513B2Oct 7, 2008
Gas shower, lithographic apparatus and use of a gas shower
ASML NETHERLANDS BV2 citations62
US9363879B2Jun 7, 2016
Module and method for producing extreme ultraviolet radiation
ASML NETHERLANDS BV0 citations51
US7728951B2Jun 1, 2010
Lithographic apparatus and method for conditioning an interior space of a device manufacturing apparatus
ASML NETHERLANDS BV0 citations51
US7446849B2Nov 4, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
US7978339B2Jul 12, 2011
Lithographic apparatus temperature compensation
ASML NETHERLANDS BV0 citations41
VAN EMPEL TJARKO ADRIAAN RUDOLF
6 patentsUS8451429B2May 28, 2013
Dichroic mirror, method for manufacturing a dichroic mirror, lithographic apparatus, semiconductor device and method of manufacturing therefor
VAN EMPEL TJARKO ADRIAAN RUDOLF6 citations71
US8901521B2Dec 2, 2014
Module and method for producing extreme ultraviolet radiation
VAN EMPEL TJARKO ADRIAAN RUDOLF3 citations61
US8218128B2Jul 10, 2012
Lithographic apparatus and device manufacturing method incorporating a pressure shield
VAN EMPEL TJARKO ADRIAAN RUDOLF0 citations50
US8094287B2Jan 10, 2012
Lithographic appararus and method
VAN EMPEL TJARKO ADRIAAN RUDOLF0 citations48
US8072575B2Dec 6, 2011
Lithographic apparatus with temperature sensor and device manufacturing method
VAN EMPEL TJARKO ADRIAAN RUDOLF1 citations44
US9766558B2Sep 19, 2017
Lithographic apparatus with flexible transportation line having varying stiffness between two objects
VAN EMPEL TJARKO ADRIAAN RUDOLF0 citations39