Inventor
VAN DE VIJVER YURI JOHANNES GABRIËL
NL16 patents
⚠️ This page may combine multiple inventors who share the name “VAN DE VIJVER YURI JOHANNES GABRIËL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
12 patentsUS10895808B2Jan 19, 2021
Substrate holder, a lithographic apparatus and method of manufacturing devices
ASML NETHERLANDS BV2 citations70
US11664264B2May 30, 2023
Lithographic apparatus, method for unloading a substrate and method for loading a substrate
ASML NETHERLANDS BV2 citations66
US11579533B2Feb 14, 2023
Substrate holder, a lithographic apparatus and method of manufacturing devices
ASML NETHERLANDS BV0 citations60
US11385547B2Jul 12, 2022
Extraction body for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US9363879B2Jun 7, 2016
Module and method for producing extreme ultraviolet radiation
ASML NETHERLANDS BV0 citations51
US10705426B2Jul 7, 2020
Extraction body for lithographic apparatus
ASML NETHERLANDS BV0 citations48
US10317804B2Jun 11, 2019
Substrate table, lithographic apparatus and method of operating a lithographic apparatus
ASML NETHERLANDS BV0 citations48
US9971254B2May 15, 2018
Sensor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
US9753382B2Sep 5, 2017
Sensor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations48
US10571810B2Feb 25, 2020
Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus
ASML NETHERLANDS BV0 citations47
US10534270B2Jan 14, 2020
Lithography apparatus, a method of manufacturing a device and a control program
ASML NETHERLANDS BV0 citations46
US10261422B2Apr 16, 2019
Lithography apparatus and method of manufacturing a device
ASML NETHERLANDS BV0 citations46