Inventor
SWINKELS GERARDUS HUBERTUS PETRUS MARIA
NL33 patents
⚠️ This page may combine multiple inventors who share the name “SWINKELS GERARDUS HUBERTUS PETRUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
11 patentsUS8368032B2Feb 5, 2013
Radiation source, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV8 citations83
US9411238B2Aug 9, 2016
Source-collector device, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV4 citations72
US11237491B2Feb 1, 2022
Reflective optical element for a radiation beam
ASML NETHERLANDS BV2 citations63
US8368040B2Feb 5, 2013
Radiation system and lithographic apparatus
ASML NETHERLANDS BV4 citations61
US8373846B2Feb 12, 2013
Radiation source, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US8946661B2Feb 3, 2015
Radiation source, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations52
US10001709B2Jun 19, 2018
Lithographic apparatus, spectral purity filter and device manufacturing method
ASML NETHERLANDS BV0 citations51
US9363879B2Jun 7, 2016
Module and method for producing extreme ultraviolet radiation
ASML NETHERLANDS BV0 citations51
US9648714B2May 9, 2017
Fuel system for lithographic apparatus, EUV source, lithographic apparatus and fuel filtering method
ASML NETHERLANDS BV0 citations50
US9964852B1May 8, 2018
Source collector apparatus, lithographic apparatus and method
ASML NETHERLANDS BV0 citations45
US9841680B2Dec 12, 2017
Source collector apparatus, lithographic apparatus and method
ASML NETHERLANDS BV0 citations45
LOOPSTRA ERIK ROELOF
6 patentsUS9110377B2Aug 18, 2015
Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method
LOOPSTRA ERIK ROELOF5 citations71
US8547525B2Oct 1, 2013
EUV radiation generation apparatus
LOOPSTRA ERIK ROELOF5 citations71
US8431916B2Apr 30, 2013
Radiation source and lithographic apparatus
LOOPSTRA ERIK ROELOF3 citations62
US9414477B2Aug 9, 2016
Radiation source, lithographic apparatus and device manufacturing method
LOOPSTRA ERIK ROELOF1 citations52
US8462826B2Jun 11, 2013
Laser device
LOOPSTRA ERIK ROELOF0 citations51
US9091944B2Jul 28, 2015
Source collector, lithographic apparatus and device manufacturing method
LOOPSTRA ERIK ROELOF0 citations40
MESTROM WILBERT JAN
2 patentsVAN DE VIJVER YURI JOHANNES GABRIEL
2 patentsYAKUNIN ANDREI MIKHAILOVICH
2 patentsBANINE VADIM YEVGENYEVICH
2 patentsUS9097982B2Aug 4, 2015
Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filter
BANINE VADIM YEVGENYEVICH0 citations51
US9594306B2Mar 14, 2017
Lithographic apparatus, spectral purity filter and device manufacturing method
BANINE VADIM YEVGENYEVICH0 citations49