Inventor
HAAST MARC ANTONIUS MARIA
NL10 patents
⚠️ This page may combine multiple inventors who share the name “HAAST MARC ANTONIUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS7586108B2Sep 8, 2009
Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector
ASML NETHERLANDS BV56 citations94
US7525638B2Apr 28, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations81
US7282701B2Oct 16, 2007
Sensor for use in a lithographic apparatus
ASML NETHERLANDS BV12 citations81
US7453078B2Nov 18, 2008
Sensor for use in a lithographic apparatus
ASML NETHERLANDS BV8 citations71
US7655367B2Feb 2, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations70
US7145630B2Dec 5, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
NIHTIANOV STOYAN
2 patentsUS8138485B2Mar 20, 2012
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
NIHTIANOV STOYAN35 citations86
US8426831B2Apr 23, 2013
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
NIHTIANOV STOYAN6 citations78