P

Inventor

JONKERS PETER GERARDUS

NL6 patents
⚠️ This page may combine multiple inventors who share the name “JONKERS PETER GERARDUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents
US11340532B2May 24, 2022

Prolonging optical element lifetime in an EUV lithography system

ASML NETHERLANDS BV5 citations79
US11846887B2Dec 19, 2023

Prolonging optical element lifetime in an EUV lithography system

ASML NETHERLANDS BV1 citations57
US10310394B2Jun 4, 2019

Lithographic apparatus, a projection system and a device manufacturing method

ASML NETHERLANDS BV0 citations35

NIENHUYS HAN-KWANG

1 patent
US8625068B2Jan 7, 2014

Lithographic apparatus configured to suppress contamination from passing into the projection system and method

NIENHUYS HAN-KWANG1 citations47

SCHIMMEL HENDRIKUS GIJSBERTUS

1 patent
US8711325B2Apr 29, 2014

Method and system for determining a suppression factor of a suppression system and a lithographic apparatus

SCHIMMEL HENDRIKUS GIJSBERTUS0 citations45

LOOPSTRA ERIK ROELOF

1 patent
US8289498B2Oct 16, 2012

Lithographic apparatus and device manufacturing method

LOOPSTRA ERIK ROELOF1 citations45