Inventor

LABETSKI DZMITRY

NL22 patents

⚠️ This page may combine multiple inventors who share the name “LABETSKI DZMITRY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LABETSKI DZMITRY

ASML NETHERLANDS BV

Radiation source, lithographic apparatus, and device manufacturing method

Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method

Droplet generator, EUV radiation source, lithographic apparatus, method for generating droplets and device manufacturing method

Radiation source and lithographic apparatus

Apparatus for and method of reducing contamination from source material in an EUV light source

Radiation source and lithographic apparatus

Guiding device and associated system

Guiding device and associated system

Guiding device and associated system

Fuel stream generator, source collector apparatus and lithographic apparatus

Module and method for producing extreme ultraviolet radiation

SCHIMMEL HENDRIKUS GIJSBERTUS

Radiation source

Radiation source and lithographic apparatus

Method and system for determining a suppression factor of a suppression system and a lithographic apparatus

LABETSKI DZMITRY

Collector mirror assembly and method for producing extreme ultraviolet radiation

Source module, radiation source and lithographic apparatus

Gas gauge, lithographic apparatus and device manufacturing method

VAN DE VIJVER YURI JOHANNES GABRIEL

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

VAN EMPEL TJARKO ADRIAAN RUDOLF

Module and method for producing extreme ultraviolet radiation

YAKUNIN ANDREI MIKHAILOVICH

Radiation source and lithographic apparatus

LOOPSTRA ERIK ROELOF

Source collector, lithographic apparatus and device manufacturing method