Inventor
MARTINO RONALD M
US3 patents
Patents
3 patentsUS6184151B1Feb 6, 2001
Method for forming cornered images on a substrate and photomask formed thereby
IBM92 citations97
US5959325ASep 28, 1999
Method for forming cornered images on a substrate and photomask formed thereby
IBM43 citations95
US5538833AJul 23, 1996
High resolution phase edge lithography without the need for a trim mask
IBM31 citations91