Inventor
EZUMI MAKOTO
JP55 patents
⚠️ This page may combine multiple inventors who share the name “EZUMI MAKOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
33 patentsUS6538249B1Mar 25, 2003
Image-formation apparatus using charged particle beams under various focus conditions
HITACHI LTD118 citations99
US5872358AFeb 16, 1999
Scanning electron microscope
HITACHI LTD132 citations99
US6847038B2Jan 25, 2005
Scanning electron microscope
HITACHI LTD74 citations98
US6946656B2Sep 20, 2005
Sample electrification measurement method and charged particle beam apparatus
HITACHI LTD56 citations96
US6646262B1Nov 11, 2003
Scanning electron microscope
HITACHI LTD57 citations96
US6635873B1Oct 21, 2003
Scanning electron microscope with voltage applied to the sample
HITACHI LTD45 citations96
US6084238AJul 4, 2000
Scanning electron microscope
HITACHI LTD47 citations96
US5900629AMay 4, 1999
Scanning electron microscope
HITACHI LTD83 citations96
US5608218AMar 4, 1997
Scanning electron microscope
HITACHI LTD69 citations96
US7642514B2Jan 5, 2010
Charged particle beam apparatus
HITACHI LTD14 citations93
US7109485B2Sep 19, 2006
Charged particle beam apparatus
HITACHI LTD19 citations93
US7075078B2Jul 11, 2006
Scanning electron microscope
HITACHI LTD20 citations93
US6936818B2Aug 30, 2005
Charged particle beam apparatus
HITACHI LTD12 citations93
US6885001B2Apr 26, 2005
Scanning electron microscope
HITACHI LTD20 citations93
US6864493B2Mar 8, 2005
Charged particle beam alignment method and charged particle beam apparatus
HITACHI LTD36 citations93
US6787772B2Sep 7, 2004
Scanning electron microscope
HITACHI LTD32 citations93
US6653633B2Nov 25, 2003
Charged particle beam apparatus
HITACHI LTD22 citations93
US6069356AMay 30, 2000
Scanning electron microscope
HITACHI LTD21 citations93
US7372028B2May 13, 2008
Sample electrification measurement method and charged particle beam apparatus
HITACHI LTD14 citations92
US7087899B2Aug 8, 2006
Sample electrification measurement method and charged particle beam apparatus
HITACHI LTD19 citations92
US6872944B2Mar 29, 2005
Scanning electron microscope
HITACHI LTD24 citations92
US6667476B2Dec 23, 2003
Scanning electron microscope
HITACHI LTD40 citations92
US6512228B2Jan 28, 2003
Scanning electron microscope
HITACHI LTD17 citations92
US6444981B1Sep 3, 2002
Scanning electron microscope
HITACHI LTD34 citations92
US7977632B2Jul 12, 2011
Scanning electron microscope
HITACHI LTD8 citations84
US7700918B2Apr 20, 2010
Sample electrification measurement method and charged particle beam apparatus
HITACHI LTD8 citations84
US7659508B2Feb 9, 2010
Method for measuring dimensions of sample and scanning electron microscope
HITACHI LTD11 citations84
US7605381B2Oct 20, 2009
Charged particle beam alignment method and charged particle beam apparatus
HITACHI LTD9 citations84
US7049591B2May 23, 2006
Scanning electron microscope
HITACHI LTD11 citations84
US7442923B2Oct 28, 2008
Scanning electron microscope
HITACHI LTD5 citations74
US7399966B2Jul 15, 2008
Scanning electron microscope
HITACHI LTD6 citations74
US7329868B2Feb 12, 2008
Charged particle beam apparatus
HITACHI LTD7 citations74
US7294835B2Nov 13, 2007
Scanning electron microscope
HITACHI LTD3 citations63
HITACHI HIGH TECH CORP
13 patentsUS7022983B2Apr 4, 2006
Monochromator and scanning electron microscope using the same
HITACHI HIGH TECH CORP15 citations93
US6956211B2Oct 18, 2005
Charged particle beam apparatus and charged particle beam irradiation method
HITACHI HIGH TECH CORP15 citations93
US7355174B2Apr 8, 2008
Charged particle beam emitting device and method for adjusting the optical axis
HITACHI HIGH TECH CORP10 citations84
US7282722B2Oct 16, 2007
Charged particle beam apparatus and charged particle beam irradiation method
HITACHI HIGH TECH CORP10 citations84
US7714286B2May 11, 2010
Charged particle beam apparatus, aberration correction value calculation unit therefor, and aberration correction program therefor
HITACHI HIGH TECH CORP11 citations83
US7459681B2Dec 2, 2008
Scanning electron microscope
HITACHI HIGH TECH CORP8 citations74
US7408172B2Aug 5, 2008
Charged particle beam apparatus and charged particle beam irradiation method
HITACHI HIGH TECH CORP8 citations74
US7315024B2Jan 1, 2008
Monochromator and scanning electron microscope using the same
HITACHI HIGH TECH CORP5 citations74
US7838827B2Nov 23, 2010
Monochromator and scanning electron microscope using the same
HITACHI HIGH TECH CORP4 citations63
US7718976B2May 18, 2010
Charged particle beam apparatus
HITACHI HIGH TECH CORP6 citations63
US7612336B2Nov 3, 2009
Scanning electron microscope having a monochromator
HITACHI HIGH TECH CORP4 citations62
US7960696B2Jun 14, 2011
Method for inspecting and measuring sample and scanning electron microscope
HITACHI HIGH TECH CORP4 citations61
US7566872B2Jul 28, 2009
Scanning electron microscope
HITACHI HIGH TECH CORP1 citations52
EZUMI MAKOTO
2 patentsSASAKI YUKO
1 patentARAI NORIAKI
1 patentShowing the top 50 of 55 patents by PatentIndex Score.