Inventor

KATO MISUGI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “KATO MISUGI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MIKAMI KOICHI

1 patent

US8809557B2Aug 19, 2014

Method for producing optically active fluorinated oxetane

MIKAMI KOICHI0 citations31

KATO MISUGI

1 patent

US9221928B2Dec 29, 2015

Fluorine-containing sulfonate resin, fluorine-containing N-sulfonyloxyimide resin, resist composition and pattern formation method

KATO MISUGI0 citations29