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Inventor
XAVIER PASCAL B
SG
2 patents
Patents
2 patents
US6516665B1
Feb 11, 2003
Micro-electro-mechanical gyroscope
PENN STATE RES FOUND
87 citations
95
US6984332B2
Jan 10, 2006
Method for making a micro-electro-mechanical gyroscope
PENN STATE RES FOUND
24 citations
89