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Inventor
LIN YIH-SHI
TW
2 patents
Patents
2 patents
US6723646B2
Apr 20, 2004
Method for controlling and monitoring a chemical mechanical polishing process
MACRONIX INT CO LTD
6 citations
60
US6552360B1
Apr 22, 2003
Method and circuit layout for reducing post chemical mechanical polishing defect count
MACRONIX INT CO LTD
2 citations
60