Inventor

BERRY III IVAN

US2 patents

Patents

2 patents

US7629272B2Dec 8, 2009

Ultraviolet assisted porogen removal and/or curing processes for forming porous low k dielectrics

AXCELIS TECH INC26 citations90

US7709814B2May 4, 2010

Apparatus and process for treating dielectric materials

AXCELIS TECH INC12 citations80