Inventor

KOMETANI YASUYUKI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KOMETANI YASUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOMETANI YASUYUKI

2 patents

US8216390B2Jul 10, 2012

Cleaning and drying-preventing method, and cleaning and drying-preventing apparatus

KOMETANI YASUYUKI3 citations55

US8512478B2Aug 20, 2013

Cleaning and drying-preventing method, and cleaning and drying-preventing apparatus

KOMETANI YASUYUKI0 citations45

TOKYO ELECTRON LTD

1 patent

US7485188B2Feb 3, 2009

Coating process method and coating process apparatus

TOKYO ELECTRON LTD9 citations81