Inventor

DIXON WARD

US3 patents

⚠️ This page may combine multiple inventors who share the name “DIXON WARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KWAK HIDONG

2 patents

US8830486B2Sep 9, 2014

Atmospheric molecular contamination control with local purging

KWAK HIDONG6 citations75

US9046474B2Jun 2, 2015

Multi-analyzer angle spectroscopic ellipsometry

KWAK HIDONG2 citations57

KLA TENCOR CORP

1 patent

US9110020B2Aug 18, 2015

Atmospheric molecular contamination control with local purging

KLA TENCOR CORP0 citations45