Inventor

CHEN YING-TSUNG

TW53 patents

⚠️ This page may combine multiple inventors who share the name “CHEN YING-TSUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN YING-TSUNG

TAIWAN SEMICONDUCTOR MFG CO LTD

Multi-layer mask and method of forming same

Hard mask removal method

Hard mask removal method

Hard mask removal method

Hard mask removal method

Doped poly-silicon for polyCMP planarity improvement

Chemical mechanical polishing cleaning system with temperature control for defect reduction

Methods of forming semiconductor device and dielectric fin

Hard mask removal method

Planarization control in semiconductor manufacturing process

Methods for reducing scratch defects in chemical mechanical planarization

Methods of forming semiconductor devices

Semiconductor device and method

Chemical mechanical polishing cleaning system with temperature control for defect reduction

Semiconductor device and method of forming the same

Multi-layer mask and method of forming same

System and method for removing impurities during chemical mechanical planarization

Doped poly-silicon for PolyCMP planarity improvement

Method and apparatus for semiconductor planarization

Surface treatment in a chemical mechanical process

Asymmetric application of pressure to a wafer during a CMP process

Amorphorus silicon insertion for STI-CMP planarity improvement

TAIWAN SEMICONDUCTOR MFG

Post-ESL porogen burn-out for copper ELK integration

Method and structure for ultra narrow gate

Method of forming copper interconnects

Interconnect structure with dielectric barrier and fabrication method thereof

Method for planarizing semiconductor structures

Semiconductor device including I/O oxide and nitrided core oxide on substrate

CMP slurry particle breakup

UNITED MICROELECTRONICS CORP

Semiconductor device and method of forming the same

Semiconductor structure

Method of forming semiconductor device having metal gate

Manufacturing method of non-planar FET

Manufacturing method for semiconductor device having metal gate

TSAI SHIH-HUNG

Method of forming fin structures in integrated circuits

Method for manufacturing multi-gate transistor device

Method of forming semiconductor device

Non-planar FET and manufacturing method thereof

FU SSU-I

Manufacturing method for semiconductor device having metal gate

Multi-gate MOSFET with embedded isolation structures

CHEN YING-TSUNG

Fabrication method of a non-planar transistor

Semiconductor process

TU CHE-HAO

Gate height loss improvement for a transistor

Planarization process for semiconductor device fabrication

LIU AN-CHI

Semiconductor structure and method of fabricating the same

(unassigned)

Miniature garbage incinerator

HWANG GUANG-YAW

Oxygen treatment of replacement work-function metals in CMOS transistor gates

IND TECH RES INST

Polishing composition

WU ZHEN-CHENG

Semiconductor device including I/O oxide nitrided core oxide on substrate

YANG WEN-LUNG

Greasy soot purifying device