Inventor
YOKOYA JIRO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “YOKOYA JIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
8 patentsUS9405200B2Aug 2, 2016
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD2 citations62
US9029070B2May 12, 2015
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD3 citations62
US8900795B2Dec 2, 2014
Resist composition, method of forming resist pattern and novel compound
TOKYO OHKA KOGYO CO LTD2 citations62
US9494866B2Nov 15, 2016
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations51
US9023585B2May 5, 2015
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations51
US9377685B2Jun 28, 2016
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations41
US8956800B2Feb 17, 2015
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations41
US9459528B2Oct 4, 2016
Negative tone resist composition for solvent developing and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations39