Inventor

JAU JACK

US47 patents

⚠️ This page may combine multiple inventors who share the name “JAU JACK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JAU JACK

HERMES MICROVISION INC

Structure for inspecting defects in word line array fabricated by SADP process and method thereof

Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing

Apparatus of plural charged-particle beams

Inspection method and system

Method and system for fast inspecting defects

Method and system for measuring critical dimension and monitoring fabrication uniformity

Operation stage for wafer edge inspection and review

Method and system for fast inspecting defects

Charged particle beam apparatus

Local alignment point calibration method in die inspection

Dynamic focus adjustment with optical height detection apparatus in electron beam system

Charged particle beam apparatus

Method and system for measuring critical dimension and monitoring fabrication uniformity

Method and system for measuring critical dimension and monitoring fabrication uniformity

Method and system for determining a defect during sample inspection involving charged particle beam imaging

Method for inspecting overlay shift defect during semiconductor manufacturing and apparatus thereof

Method for regulating scanning sample surface charge in continuous and leap-and-scan scanning mode imaging process

Charged particle beam imaging method and system thereof

Inspection method and system

Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing

Charged particle beam apparatus

Charged particle beam apparatus

ASML NETHERLANDS BV

Local alignment point calibration method in die inspection

Apparatus of plural charged-particle beams

Inspection method and system

Methods of inspecting samples with multiple beams of charged particles

Inspection method and system

Local alignment point calibration method in die inspection

Inspection method and system

Charged particle beam apparatus

FANG WEI

Charged particle beam imaging assembly and imaging method thereof

Method for inspecting localized image and system thereof

Method and system for fast inspecting defects

Method and system for measuring critical dimension and monitoring fabrication uniformity

Method for inspecting overlay shift defect during semiconductor manufacturing and apparatus thereof

Method and system of classifying defects on a wafer

ZHAO YAN

Method and apparatus for reducing substrate edge effect during inspection

Charged particle beam inspection method

Method for examining a sample by using a charged particle beam

Method for examining a sample by using a charged particle beam

XIAO HONG

Structure and method for determining a defect in integrated circuit manufacturing process

HERMES MICROVISION TAIWAN INC

Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing

Zhang zhao-li

Method and system for determining a defect during charged particle beam inspection of a sample

LIAO CHAD

Method and system for filtering noises in an image scanned by charged particles

JAU JACK

E-beam defect review system

HERMES-MICROVISION INC

Method and system of classifying defects on a wafer

WANG JOE

Dynamic focus adjustment with optical height detection apparatus in electron beam system