Inventor

KOHNO HIROTAKA

JP12 patents

⚠️ This page may combine multiple inventors who share the name “KOHNO HIROTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

8 patents

US7982857B2Jul 19, 2011

Stage apparatus, exposure apparatus, and exposure method with recovery device having lyophilic portion

NIKON CORP15 citations83

US9746781B2Aug 29, 2017

Exposure apparatus and method for producing device

NIKON CORP2 citations73

US10338480B2Jul 2, 2019

Lithography system, simulation apparatus, and pattern forming method

NIKON CORP2 citations72

US9019467B2Apr 28, 2015

Exposure method, substrate stage, exposure apparatus, and device manufacturing method

NIKON CORP2 citations62

US9268237B2Feb 23, 2016

Exposure method, substrate stage, exposure apparatus, and device manufacturing method

NIKON CORP0 citations52

US8384880B2Feb 26, 2013

Exposure method, substrate stage, exposure apparatus, and device manufacturing method

NIKON CORP0 citations52

US10846457B2Nov 24, 2020

Lithography system, simulation apparatus, and pattern forming method

NIKON CORP0 citations51

US9599907B2Mar 21, 2017

Exposure apparatus and device manufacturing method

NIKON CORP0 citations51

NISHII YASUFUMI

1 patent

US9798245B2Oct 24, 2017

Exposure apparatus, and exposure method, with recovery device to recover liquid leaked from between substrate and member

NISHII YASUFUMI2 citations72

NIPPON KOGAKU KK

1 patent

US9846371B2Dec 19, 2017

Exposure method, substrate stage, exposure apparatus, and device manufacturing method

NIPPON KOGAKU KK0 citations52

NAGASAKA HIROYUKI

1 patent

US8488099B2Jul 16, 2013

Exposure apparatus and device manufacturing method

NAGASAKA HIROYUKI0 citations51

OWA SOICHI

1 patent

US8208117B2Jun 26, 2012

Exposure method, substrate stage, exposure apparatus, and device manufacturing method

OWA SOICHI0 citations51