Inventor
NISHII YASUFUMI
JP22 patents
⚠️ This page may combine multiple inventors who share the name “NISHII YASUFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
11 patentsUS7542128B2Jun 2, 2009
Exposure apparatus, exposure method, and method for producing device
NIKON CORP46 citations96
US7982857B2Jul 19, 2011
Stage apparatus, exposure apparatus, and exposure method with recovery device having lyophilic portion
NIKON CORP15 citations83
US7804576B2Sep 28, 2010
Maintenance method, maintenance device, exposure apparatus, and device manufacturing method
NIKON CORP7 citations74
US9019467B2Apr 28, 2015
Exposure method, substrate stage, exposure apparatus, and device manufacturing method
NIKON CORP2 citations62
US8035800B2Oct 11, 2011
Exposure apparatus, maintenance method, exposure method, and method for producing device
NIKON CORP2 citations62
US9766555B2Sep 19, 2017
Exposure apparatus, exposure method, and method for producing device
NIKON CORP0 citations52
US9268237B2Feb 23, 2016
Exposure method, substrate stage, exposure apparatus, and device manufacturing method
NIKON CORP0 citations52
US9182684B2Nov 10, 2015
Exposure apparatus, exposure method, and method for producing device
NIKON CORP0 citations52
US8891055B2Nov 18, 2014
Maintenance method, maintenance device, exposure apparatus, and device manufacturing method
NIKON CORP0 citations52
US8384880B2Feb 26, 2013
Exposure method, substrate stage, exposure apparatus, and device manufacturing method
NIKON CORP0 citations52
US9599907B2Mar 21, 2017
Exposure apparatus and device manufacturing method
NIKON CORP0 citations51
NISHII YASUFUMI
6 patentsUS9013675B2Apr 21, 2015
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
NISHII YASUFUMI32 citations94
US8134685B2Mar 13, 2012
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
NISHII YASUFUMI43 citations94
US8477283B2Jul 2, 2013
Exposure apparatus and device manufacturing method
NISHII YASUFUMI26 citations92
US8233139B2Jul 31, 2012
Immersion system, exposure apparatus, exposing method, and device fabricating method
NISHII YASUFUMI13 citations83
US9798245B2Oct 24, 2017
Exposure apparatus, and exposure method, with recovery device to recover liquid leaked from between substrate and member
NISHII YASUFUMI2 citations72
US8300207B2Oct 30, 2012
Exposure apparatus, immersion system, exposing method, and device fabricating method
NISHII YASUFUMI2 citations62