P

Inventor

MORIYA SHUJI

JP40 patents
⚠️ This page may combine multiple inventors who share the name “MORIYA SHUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

18 patents
US5494522AFeb 27, 1996

Plasma process system and method

TOKYO ELECTRON LTD90 citations95
US5439026AAug 8, 1995

Processing apparatus and flow control arrangement therefor

TOKYO ELECTRON LTD81 citations95
US5578129ANov 26, 1996

Gas supplying head and load lock chamber of semiconductor processing system

TOKYO ELECTRON LTD37 citations92
US5441076AAug 15, 1995

Processing apparatus using gas

TOKYO ELECTRON LTD51 citations92
US5307568AMay 3, 1994

Gas supply system

TOKYO ELECTRON LTD51 citations92
US9236272B2Jan 12, 2016

Etching apparatus and etching method

TOKYO ELECTRON LTD3 citations73
US5421365AJun 6, 1995

Flow control apparatus

TOKYO ELECTRON LTD15 citations73
US6346425B1Feb 12, 2002

Vapor-phase processing method capable of eliminating particle formation

TOKYO ELECTRON LTD8 citations72
US5294280AMar 15, 1994

Gas measuring device and processing apparatus provided with the gas measuring device

TOKYO ELECTRON LTD9 citations72
US10786837B2Sep 29, 2020

Method for cleaning chamber of substrate processing apparatus

TOKYO ELECTRON LTD3 citations71
US7862638B2Jan 4, 2011

Gas supply system for semiconductor manufacturing apparatus

TOKYO ELECTRON LTD2 citations63
US7682843B2Mar 23, 2010

Semiconductor fabrication system, and flow rate correction method and program for semiconductor fabrication system

TOKYO ELECTRON LTD5 citations62
US9012331B2Apr 21, 2015

Etching method and non-transitory storage medium

TOKYO ELECTRON LTD3 citations57
US8893743B2Nov 25, 2014

Flow rate controller and processing apparatus

TOKYO ELECTRON LTD2 citations56
US9371946B2Jun 21, 2016

Pipe joint

TOKYO ELECTRON LTD0 citations52
US10312101B2Jun 4, 2019

Substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD0 citations51
US9691630B2Jun 27, 2017

Etching method

TOKYO ELECTRON LTD1 citations51
US11761075B2Sep 19, 2023

Substrate cleaning apparatus

TOKYO ELECTRON LTD0 citations50

CANON KK

13 patents

MORIYA SHUJI

3 patents

NEC ELECTRONICS CORP

1 patent

TOSHIBA CERAMICS CO

1 patent

OKASE WATARU

1 patent

EBI HIROYUKI

1 patent

OKABE TSUNEYUKI

1 patent

FUJIKIN KK

1 patent